An unofficial list of the highest Tournament Performance Ratings (TPRs) on record in standard FIDE classical tournaments since 1970 is here: https://deletionpedia.org/en/List_of_highest_chess_Tournament_Performance_Ratings
Because this list was last updated in May 2015, high TPRs after that would not be included. However, I'm tentatively doubtful there has been a 3000+ rated performance since 2015. Usually Carlsen's best performance is thought to be Pearl Spring, Nanjing 2009, which barely crossed 3000. That's included on this list.
Adding in Firouzja, there are only 3 performances at 3000+:
- Fabiano Caruana - St Louis, 2014 - 3098
- Alireza Firouzja - ETCC, 2021 - 3015
- Magnus Carlsen - Nanjing, 2009 - 3002
Not accounting for inflation, it appears Firouzja may have already surpassed Carlsen's highest-ever TPR. As you say, incredible stuff.
You might also find Jeff Sonas' attempt to correct for inflation interesting. (He concludes Karpov at Linares 1994 is the greatest tournament performance ever.) It's quite possible, given this article was written in the wake of Nanjing 2009, that similar analyses will be shortly produced on Chessmetrics so we can compare Firouzja's achievement.
EDIT: note that 100% pointscore results are generally excluded from discussions of TPR because the estimation cannot follow normal elo methods and is done by a separate and little-validated heuristic.